ADVANCED LAPPING VEHICLE FOR SEMICONDUCTOR WAFERS
PRODUCT DESCRIPTION：
Lapping Suspension Vehicle sets a new standard for all synthetic lapping vehicles. It represents a new generation of high suspension lapping vehicle that offers superior wafer geometry at flow rates up to 50% lower than conventional products.
Please contact our Technical Service Department for usage recommendations specific to your process.
PRODUCT BENEFITS / FEATURES :
- 50% reduction in flow rates compared to competitive products.
- Improved total thickness variation.
- Very high suspension capability.
- Rapid stock removal.
- Excellent lubrication properties. Reduces scratches.
- Environmentally friendly - reduces lapping waste.
- Designed for wafers up to 300mm.
TYPICAL PROPERTIES :
| Appearance | : | Clear Gel |
| Color | : | water white |
| Odor | : | Bland |
| Refractive Index | : | 1.3550 - 1.3750 |
| Density – (G/CC) | : | 1.00 - 1.03 |
| Viscosity Brookfield @ 25℃( cps ) | : | 42,000 - 47,000 |
| pH | : | 8.80 - 9.30 |
| BOD5 – EPA test method 410.4 (g/g) | : | 0.002 |
| COD – EPA test method 405.1 (g/g) | 0.01 | |
| RoHS compliant |
- Typical properties do not constitute exact specifications
Lapping slurry – starting formula :
When using Lapping Suspension Vehicle on Peter Wolters “high pressure” lapping, the starting slurry formula should be :
| Lapping Suspension Vehicle | 4 % |
| D. I. H2O | 76 % |
| FUJIMI ABRASIVE | 20 % |
Note on Speedfam, Hamai, Fujikoshi machines with “dead weight” pressure the starting slurry formula should be :
| Lapping Suspension Vehicle | 0.8 % |
| D. I. H2O | 79.2 % |
| FUJIMI ABRASIVE | 20.0 % |
TYPICAL MIXING PROCEDURE : ( for Peter Wolters machine )
- Charge 100 liters of de-ionized water into a 200 liters stainless steel dish bottom tank equipped with a 15cm low propeller type mixer.
- Start agitation and set at 400-500 rpm.
- Add 30kg of abrasive slowly into the tank while mixing. ( Charging the abrasive through a metal screen will help to break up lumps. )
- Mix 12 minutes at 400-500 rpm.
- Allow foam to subside.
- Add Lapping Suspension Vehicle.
- Mix 15 minutes at 100-200 rpm.
- Add slurry to lapping machine sump
CLEANILNG :
We recommend the use of COMECLEAN for post lap cleaning. Our Technical Service Department would be happy to discuss alternate cleaners for special applications.
PACKING :
275 U.S. gallon totes, 55 U.S. gallon plastic drums and 6 U.S. gallon U.N. approved plastic pails.
STORAGE :
Maintain temperature between 5℃ - 35℃.